Description

Laser doping plays a crucial role in advanced semiconductor device fabrication. This study introduces a novel method for selectively hyper-doping high-purity (HP) semi-insulating (SI) 4H-silicon carbide (SiC) with p-type dopants like boron and gallium, using a pulsed Nd:YAG laser (λ = 1064 nm) at ambient temperature. Boric acid and gallium nitrate solutions served as precursors for p-type doping in 4H-SiC. Initial challenges arose from insufficient heating-induced diffusion of dopant atoms into transparent HP SI 4H-SiC substrates by the laser. Hence, a laser-assisted deposition technique was adopted, applying a thin film of n-type α-SiC nanoparticles onto the substrate via spin-coating, followed by laser sintering to enhance laser energy absorption and facilitate effective heat conduction from the film to the substrate. The impact of boron and gallium doping on the optical properties, including transmittance, reflectance, and absorptance, of the SiC substrates within the mid-wave infrared range was assessed using FTIR spectrometry. Both dopants created an acceptor energy level at ~ 0.3 eV within the 4H-SiC bandgap, corresponding to 4.3 µm wavelength, resulting in selective photon absorption and notable alterations in the optical properties of the laser-doped regions. The influence of various laser processing parameters on dopant concentration was investigated. Additionally, a new theoretical model was developed to determine and compare variations in refraction and absorption indices induced by both dopants. Morphological, optical, and electrical properties of the as-received (undoped) and doped SiC substrates are comprehensively examined.

Contributing Authors

  • Gunjan S Kulkarni
    University of Central Florida
  • Yahya Bougdid
    University of Central Florida
  • Chandraika (John) Sugrim
    Naval Air Warfare Center, Aircraft Division
  • Ranganathan Kumar
    University of Central Florida
  • Aravinda Kar
    University of Central Florida
Gunjan S Kulkarni
University of Central Florida
Track: Laser Materials Microprocessing
Session: Processing of Non-Metals II
Day of Week: Tuesday
Date/Time:
Location: Los Feliz

Keywords

  • Boron
  • Gallium
  • P-Type Laser Doping
  • Refraction Index Modulation
  • Silicon Carbide