Description

A demand of power module devices has been increasing for highly energy efficient social system. The insulated heat sink printed circuit board is the key component of power module devices, which is composed of copper and aluminum nitride (AlN) due to high thermal conductivity. The conventional method of the joining between copper and AlN is active metal brazing method, but there is an issue that the high heat treatment of this method generates thermal residual stress on the board and decrease the reliability. For that reason, the development of a direct bonding process between copper and AlN has been demanded. Therefore, we focused on the Laser Metal Deposition (LMD) method, which is a selective heating and microfabrication process. The LMD method is a method in which a powder material is supplied to the processing point and irradiated with a laser to melt the powder and form layer on the surface of the substrate. Then, a blue diode laser with a wavelength of 450 nm, which has a high absorptivity of 60% for copper, is used as a heat source. In addition, the multibeam type LMD system has been installed for the uniform heating of powder. In this study, the laser power density, laser scanning speed and powder feeding rate were changed to explore the conditions for forming a copper layer on AlN substrate.

Contributing Authors

  • Keisuke Takenaka
    Joining and Welding Research Institute Osaka University
  • Jumpei Tokumoto
    Joining and Welding Research Institute Osaka University
  • Koji Kobayashi
    DOWA POWER DEVICE Co., Ltd.
  • Hideyo Osanai
    DOWA POWER DEVICE Co., Ltd.
  • Koji Tojo
    SHIMADZU CORPORATION
  • Yuji Sato
    Joining and Welding Research Institute Osaka University
  • Masahiro Tsukamoto
    Joining and Welding Research Institute Osaka University
Keisuke Takenaka
Joining and Welding Research Institute Osaka University
Track: Laser Additive Manufacturing
Session: Poster Gallery
Day of Week: Tuesday
Date/Time:
Location: Hollywood Ballroom Foyer

Keywords

  • Aluminum Nitride
  • Blue Diode Laser
  • Laser Metal Deposition
  • Pure Copper