Description

There has been strong interest in laser direct lithography(LDL) due to flexibility of patterning based on software. However, the conventional LDL has a problem that is too slow compared to mask lithography because it depends on the scanning velocity of laser beam or stages, which causes a decrease in productivity, making it difficult to apply to manufacturing. To overcome these drawbacks, we implemented a resonant mirror based LDL, which is different from the conventional laser scanning method based on a stepper motor. The laser source of the instrument is a laser diode(LD) which has 405 nm wavelength, and the optics are designed to have a beam spot size of less than 20um in the focal plane. We applied this feature to laser scan system and have set 800Hz frequency. It can create a pattern in 1.25us for a line of about 10 mm. Compared to the conventional LDL system using the laser scanning method, the resonant mirror based LDL system has the advantages of being over 80,000 times faster in processing time. The designed LDL system capable of high-speed scanning with uniform physical characteristics is expected to meet the demand for small quantity production of diverse items as well as low operation costs.

Contributing Authors

  • Jun Hee Jo
    Korea Institute of Machinery and Materials | University of Science and Technology
  • Hyungjun Lim
    Korea Institute of Machinery and Materials | University of Science and Technology
  • Won Seok Chang
    Korea Institute of Machinery and Materials | University of Science and Technology
Won Seok Chang
Korea Institute of Machinery and Materials | University of Science and Technology
Track: Laser Materials Microprocessing
Session: Poster Gallery
Day of Week: Tuesday
Date/Time:
Location: Exhibit Hall

Keywords

  • Laser Direct Lithography
  • Resonant Mirror