Laser Processing at the micrometer and below resolution is becoming more and more prominent driving the requirements of the equipment used for these processes to achieve more demanding specifications. Two-photon polymerization (2PP), selective laser etching of glass, and laser micromachining are several emerging processes that fall into this category. They rely on ultrafast lasers in the femtosecond pulse width regime focused with high numerical or high N/A focusing optics to achieve sub-micrometer spot size. The small spot size enables impressive processing resolution on the order of 150 cubic nanometers but it also creates real challenges for positioning a beam so small and allowing that beam to make large enough parts for practical applications.

This challenge can be overcome by the use of high-dynamic laser scan heads that leverage galvanometer servo motors and precision linear motors to extend the scanning range beyond a fixed field of view. Combining the motion of the scanner motors and physical linear motors in a seamless fashion where the processing speed of the laser on the linear axes is shared between the scanner and the linear motor involves advanced motion control features to execute properly. Controller features known as Infinite Field of View (IFOV) combined with Position Synchronized Output (PSO) allow for large parts with nanometer precision to be created. A detailed technical overview of how these features work within a motion controller and what benefit they have on the aforementioned processes will be discussed. Additionally, application examples will be shared.