Effective monitoring technologies are crucial for optimizing the efficiency of laser processes and manufactured parts. The integration of a monitoring system is especially important in industrial environments where the production of micro- and submicrometer features requires high levels of precision and reproducibility to enhance the surface functionalities.

In this frame, to ensure the quality of the machined surfaces, various characterization methods such as scanning electron microscopy (SEM), atomic force microscopy (AFM), or confocal microscopy (CM) are commonly used to analyze the micro- and nanostructured surfaces ex situ. However, it is not possible to integrate these characterization methods as real-time monitoring systems.

A possible solution is to use optical monitoring systems as well as infrared or other camera systems. In addition, technologies based on acoustic emission can also provide various insights into the laser process by analyzing the noise produced by the laser treatment.

This presentation summarizes different approaches used recently for monitoring laser-based microstructuring processes, including LIPSS and DLIP surface treatments. A diffractive-based approached is used to determine in real-time topographical information (height and period) about produced LIPSS and DLIP features using ps-laser sources. In addition, infrared cameras are also implemented, allowing correlations between the detected signal with topographical features of the produced microstructures. In addition, general information regarding the homogeneity of surface features can be retrieved. Finally, the implementation of acoustical microphones is discussed, allowing to determining relevant information about the process.