Ultrashort pulsed lasers have been proven to foster micro-manufacturing processes such as drilling, cutting, structuring and even welding, respectively. Using ultrashort pulsed laser, these processes are associated to a significantly reduced heat-affected zone, high precision and the possibility to process various materials via single or multi-photon absorption. However, in typical laser machine setups using galvanometer scanners or conventional processing optics, the processing area is limited to a 2 - 2.5 D micromachining with limited workpiece dimension. To expand the potential of ultrashort pulsed lasers for micromachining to a more flexible and large-area 3D micro processing tool, we report for the first time on the design, realization and application of an ultrashort pulsed laser equipped to a 6-axis robot. In addition, we show and discuss a sophisticated beam guidance and focus positioning concept, that are required for such a combination of laser-robot. For the fundamental characterization of the laser robot system, the dynamic laser beam position is evaluated under movement of the robot by CMOS cameras. As a particular result, for the compensation of occurring position deviations of the laser beam during and after the movement of the robot axes, the development of an innovative and high dynamic beam stabilization concept is necessary. In addition, differently pronounced influences of individual axes must be considered on beam positioning. Moreover, first laser cutting and structuring applications are demonstrated to highlight the enormous potential of the laser robot system for a flexible and large 2D and 3D laser micromachining using ultrashort laser pulses.
Keywords
- 3D Manufacturing
- Beam Stabilization
- Concept
- Robot
- Ultrashort Pulsed (Usp) Laser