The large variety of high-power laser sources available with different wavelength and CW or QCW operation modes can be used in principle in all industries to improve quality and productivity of production processes significantly. Nevertheless, the simple use of beam delivery and focusing optics is not sufficient to enable and to run an economic and innovative production process with efficient and reliable use of the laser light. The spatial and angular variation of laser sources can be minimized on the target using special designed micro-optical beam shaping systems that can bring up to several laser into one processing beam with well defined near- and farfield distribution. In addition, the optical system can shape the laser light sources to enable the same process resolution on square or rectangular target geometries. To overcome the optical limits in space and resolution given by optical apertures, the beam transformation using several micro-lens arrays with 100% used apertures keep the power density on the lowest possible level and maximize the power transmission with smallest possible mechanical dimensions. Within this paper we will introduce compact beam shaping systems designed for multi laser system at high Joule per cm² energy level used for crystallization, annealing and ablation processes on multi cm² processing targets for mass production processes in electronics, medical application, pv and latest energy storage technologies. The system design implements the specific light-material interaction with optics and target materials as well. The flexibility in designing and producing free selected surface shapes of the beam shaping micro-optics was essential to simplify the design and performance of all optical elements in the beam path to keep the power density below the damage threshold of glass and coatings with maximum energy throughput at the same time.