This work presents an all-reflective laser beam shaping technology developed for demanding high-power laser applications. It supports a broad range of regimes, from continuous-wave to ultra-short pulse lasers, and is compatible with wavelengths from the near-infrared to the deep-ultraviolet. At the core of this approach are micro-structured mirrors that enable efficient, aberration-free beam shaping while eliminating transmission through bulk optics, thereby significantly reducing thermal effects and nonlinear distortions. The mirrors are fabricated using a laser-induced micro-delamination process, which allows for fast, flexible customization of the optical surface. This process facilitates the implementation of continuous phase modulation patterns similar to those found in diffractive optical elements (DOEs), but with higher power resilience. Demonstrated functionalities include beam shaping, beam splitting, and advanced focal shaping, with emphasis on producing intensity profiles that exhibit excellent homogeneity and long-term stability. Furthermore, we explore the integration of machine learning techniques specifically diffractive neural networks to accelerate the design of complex beam shaping functions. This approach enhances design efficiency and supports rapid iteration. The resulting technology combines high design flexibility, robustness under high optical power, and scalability, making it an ideal solution for industrial laser applications such as precision laser material processing, micromachining, marking and additive manufacturing.
Keywords
- Diffractive Optical Elements (Doe)
- Laser Beam Shaping
- Laser Focal Shaping
- Laser Material Processing
- Laserbeam Splitting