We discuss the direct fabrication of embedded, graphitized features within high-purity, synthetic single-crystal diamond through ultrafast laser micromachining, for the purpose of creating narrow conductive plates in diamond. As an incorporating substrate, carbon in the form of highly pure synthetic diamond offers numerous advantageous physico-chemical properties, including hardness, durability, optical transparency, and extremely high electrical resistance. On the other hand, graphitic carbon can exhibit exceptionally low electrical resistance. For example, sandwich structures consisting of a thin sheet of diamond between two sheets of graphite with areal dimensions of 5 × 1 mm2 and 1 µm gaps between plates may be formed and evaluated. To realize these forms of regionally converted diamond, we employ ultrafast laser micromachining with high numerical aperture focusing and precise positioning control to disrupt the crystalline matrix of a well-confined volume within single-crystal synthetic diamond, forming embedded graphitic features. Graphitized plate regions 1 µm thick with 1 µm separations can be fabricated in this manner, and empirical I-V measurements indicate resistances as low as ~kΩ. We compare plates formed through both Gaussian and Bessel-beam focusing techniques, and we also address challenges involved with fabricating closely parallel, embedded graphitic plates in thick diamond substrates, including aberration, machining time, and cracking.
Keywords
- Bessel Beam
- Conductivity
- Diamond
- Graphitization
- Ultrafast Laser Micromachining