Micromachining of large-area samples presents a significant technical challenge as the discrepancy between desired micron-level feature sizes and overall part dimensions broadens. Traditional methods utilize galvo f-theta lenses with tight focuses to achieve small features, which inherently restricts the size of the scan field. Large focal length lenses can be utilized to improve the field of view but at the cost of increased spot size, greater field distortion, and  worsened accuracy. While stitching algorithms can merge multiple fields, they frequently introduce stitching and distortion errors, reduce throughput, and suffer from scan lens uniformity issues at the field edges. This work describes the utilization of SCANLab's XL SCAN to provide synchronous control of scan head and stage axes with a 355 nm picosecond laser and f163 telecentric lens, to create large area > 200 mm planar parts with a repetitive feature requiring sub-micron position. This method utilizes advanced trajectory planning to eliminate stitching and telecentric errors while maximizing throughput. Experimental data demonstrates that XL SCAN achieves a 1.53 µm to 0.52 µm reduction in feature variance and a 10.27 µm to 4.27 µm reduction in error range compared to traditional stitching methods when utilizing the TLS Kanga. Furthermore, process time is improved by 22%, offering a high-precision, high-throughput alternative for scalable manufacturing. This session will detail the synchronized control architecture and provide a comparative analysis of feature accuracy across large substrates.