Compositionally complex carbides (CCCs) have attracted increasing attention for extreme-environment applications because of their high hardness, thermal stability, and chemical resistance. However, their femtosecond laser machinability has not been sufficiently compared with that of conventional monocarbides. In this study, the femtosecond laser machinability of a representative CCC, (ZrNbTaTiHf)C, was systematically compared with that of TiC and ZrC under identical processing conditions. Trepanning drilling was performed while varying the number of scans, and the effect of hole pattern diameter on CCC was additionally investigated. Machining performance was evaluated in terms of hole diameter, depth, aspect ratio, circularity, surface damage, oxidation behavior, and hardness variation near the laser-processed region. The results showed that CCC exhibited distinct ablation and damage characteristics compared with TiC and ZrC, indicating a different thermophysical and chemical response during laser processing. Compared with the monocarbides, CCC showed a relatively stable processing behavior with limited brittle damage under appropriate conditions. In addition, the machinability of CCC strongly depended on pattern diameter, which significantly affected hole depth and aspect ratio. These findings provide comparative insight into femtosecond laser processing of CCCs and offer practical guidance for precision micromachining of advanced carbide components. The study clarifies material-dependent responses and establishes a basis for selecting suitable laser conditions when fabricating high-quality microholes in complex carbide systems for structural, thermal, and electronic applications.
Keywords
- Compositionally Complex Carbide
- Femtosecond Pulsed Laser
- Hole Drilling
- Laser Machinability
- Monocarbide